About: http://webisa.webdatacommons.org/415069498

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	aligner device 14 where the alignment procedure according to the invention is performed, and then to move the wafer to another processing station or to a storage device such as a cassette.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com