About: http://webisa.webdatacommons.org/41508653

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, one of the severe problems is that laser annealing is not uniformly conducted on the entire film surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca