About: http://webisa.webdatacommons.org/415245080

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the load lock chamber 100 may include N substrate transfer chambers separated by N-1 horizontal interior walls 214, where N is an integer greater than one.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com