| http://www.w3.org/ns/prov#value | - However, the raw material of the silicon nitride film is not limited to HCD. Specifically, it is possible to use as the raw material any kind of silicon chloride represented by a general formula SinCl2n+2, where n is an integer not smaller than 2, or SinCl2n+2???xHx, where x is an integer not smaller than 0 and not larger than 2n+1.
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