About: http://webisa.webdatacommons.org/415401267

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, not to be limited to the CoWB alloyed film, at least any one of metals and metallic compounds including Co, W, Ni, Cr and Au may be used as the metal cap film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com