About: http://webisa.webdatacommons.org/415467189

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Contact holes were formed, and TFT electrodes/leads 218, 220, 219 were formed using a metallic material, for example a multilayer film of titanium nitride and aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es