| http://www.w3.org/ns/prov#value | - Note that the present invention is not particularly limited, and as described in the above embodiment mode, the end portion of the first silicon layer 706 may also be tapered at a taper angle of 45??? or more and less than 95???, and more preferably at a taper angle of 60??? or more and less than 95??? which is almost perpendicular.
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