About: http://webisa.webdatacommons.org/415570545

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Comer rounding of the active silicon region 155 may be achieved by processes such as etching, oxidation, and/or annealing, performed after the active region definition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr