| http://www.w3.org/ns/prov#value | - FIGS. 45(a)-(m) show an embodiment of the invention for building layers on large substrates in such a manner as to minimize stresses to a large substrate that may result from deposited materials (which may be exhibit residual stress) deforming the substrate, causing cracking of deposited materials, separation between deposited materials, and so forth.
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