About: http://webisa.webdatacommons.org/416088432

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(a) substantially enclosing said thermal unit with a conductive member, said conductive member including a surface interposed between said thermal unit and said surface of said chuck; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com