| http://www.w3.org/ns/prov#value | - FIGS. 13A-13C are diagrams for explaining an etching step in the micro-oscillator manufacturing method of the second embodiment of the present invention, wherein FIG. 13A is a top plan view in the etching step, FIG. 13B is an E-E??? sectional view of FIG. 13A in the etching step, and FIG. 13C is a D-D??? sectional view of FIG. 13A in the etching step.
|
