| http://www.w3.org/ns/prov#value | - In the prior art, the silicon oxide film 3-2 and the silicon nitride film 4-2 covering the lead-out portion of the lower electrode are removed, and thereafter a metal such as aluminium or the like is vapor-deposited to form an upper electrode positioned on the silicon nitride film 4-1 serving as a dielectric and an lead-out electrode making contact with the region 2.
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