About: http://webisa.webdatacommons.org/41618847

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another aspect of the present invention is a method for controlled in-situ deep ultraviolet photon generation for photochemical enhancement of semiconductor wafer processing within a fabrication reactor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com