About: http://webisa.webdatacommons.org/41619402

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In deposition processes, the film thickness, composition, and other characteristics may also be undesirably non-uniform.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com