About: http://webisa.webdatacommons.org/416490780

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	RTD 30 of FIG. 2 has a serpentine thin film HfN resistor formed on substrate 14, which may be composed of silicon, ceramic, glass, alumina or other like material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com