About: http://webisa.webdatacommons.org/416582665

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in that a device isolation region is decreased due to lateral diffusion of the device isolation layer and production of a bird's beak.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au