About: http://webisa.webdatacommons.org/416645351

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	) or silicon oxide (SiOx) are deposited between the substrate and the leads by methods such as CVD, electron or ion beam evaporation, sputtering, or spin coating.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com