About: http://webisa.webdatacommons.org/416793885

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	d by a variety of methods known in the art including microlithography and nanolithography and use of resists and self-assembled monolayers, including functionalized self-assembled monolayers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es