About: http://webisa.webdatacommons.org/416819836

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS devices, in their very basic form, are miniaturized or micro-scaled versions of electrical and mechanical devices such as pressure sensors, valves, hinged mirrors, gears and cantilevers.
http://www.w3.org/ns/prov#wasQuotedFrom	nanowerk.com