About: http://webisa.webdatacommons.org/41695584

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another advantage of the present invention is a method of fabricating a coated stamper suitable for imprint lithography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com