| http://www.w3.org/ns/prov#value | - In this case, a dc voltage source 52 is provided to apply the heating voltage to the filament, consisting of, e.g., a Ni/Cr wire. [0032] The upper shower-head 14 is preferably configured with connection to a feed gas source 18 such that the gas 20 injected to the chamber passes over the hot-filament, e.g. through tubes in a conventional the shower-head configuration.
|
