| http://www.w3.org/ns/prov#value | - In FIG. 1(c), a conductive layer 122 is coated onto film 104 by vacuum deposition 126 of a material, such as nickel or silver, using a mask 124 to ensure that the layer of conductive material 122 is deposited on the floor of depression, on one of the adjacent sides, and on the surface of photoresist layer 106.
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