About: http://webisa.webdatacommons.org/417356906

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In these sub-micron processes, yield is affected by factors such as mask pattern fidelity, optical proximity effects, and photoresist processing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr