About: http://webisa.webdatacommons.org/417426851

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, a chamber component 114 comprising an underlying structure 111 is formed from a metal or an alloy, such as an aluminum alloy.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com