About: http://webisa.webdatacommons.org/417562597

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a semiconductor wafer processing system, semiconductor wafers are transferred from one station to another using a manipulator such as a robot.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de