About: http://webisa.webdatacommons.org/417626860

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In order to reduce impurities such as oxygen, nitrogen, and carbon as much as possible, SiH4 having a purity equal to or greater than 99.9999% is used, and GeH4 having a purity equal to or greater than 99.99% is used in the gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com