About: http://webisa.webdatacommons.org/418003168

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After evacuation, the disc can be cleaned by any suitable means provided in the loading chamber, for example means causing glow discharge, DC sputter etching or RF sputter etching.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com