About: http://webisa.webdatacommons.org/418053733

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As such, a selective oxidation is used for re-oxidation with the tungsten (W) side wall exposed. [0061] Also, high temperature anneal and other processing steps may
http://www.w3.org/ns/prov#wasQuotedFrom	google.com