About: http://webisa.webdatacommons.org/41806987

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method as in claim 3, wherein the carrier gas and the inert gas are a mixture of argon and nitrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es