| http://www.w3.org/ns/prov#value | - As shown in FIG. 2( l), in order to form the lowermost layer of the third pattern part, the solution 11(1) for third buffer layer formation is first coated onto the substrate 1 so as to include the region including the first pattern part 5 and the second pattern part 10 and the region where the third pattern part is to be formed.
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