About: http://webisa.webdatacommons.org/418111779

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate such as a silicon wafer is placed in a chamber that maintains a temperature of about 300 C. and the chamber is evacuated to a pressure of about 0.4 Torr.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com