| http://www.w3.org/ns/prov#value | - A separating apparatus 100 according to the preferred embodiment of the present invention has an ejection section (nozzle) 120 which ejects a fluid (e.g., a liquid such as water or an etchant or a gas such as air, nitrogen, or argon) toward the separation layer (porous layer 12) of the horizontally held bonded substrate stack 50.
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