About: http://webisa.webdatacommons.org/418262074

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	M???rz 2014Micron Technology, Inc.Methods of manufacturing semiconductor structures and devices including nanotubes, and semiconductor structures, devices, and systems fabricated using such methodsEP1976351A2 *29.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de