About: http://webisa.webdatacommons.org/418267408

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	rpm or more after the drying process for the surface of the to-be-cleaned substrate 2 extends to a preset area (generally, to a portion such as the end portion of the substrate in which the pattern is not formed).
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com