About: http://webisa.webdatacommons.org/418324891

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the cavity is etched into a substrate including an electrically insulating layer and an electrically conducting layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr