About: http://webisa.webdatacommons.org/418356883

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Proximity effects in a lithographic process (using optical projection printing) can arise during imaging, resist pattern formation (exposure and development), and subsequent pattern transfer steps such as etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com