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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	processes conventionally used in semiconductor fabrication. One of the most important of these fabrication processes is photolithography.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com