About: http://webisa.webdatacommons.org/41865951

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As depicted in FIG. 2A, the silicon oxide film 2 is formed over the entire surface of the silicon substrate 1 by a vacuum process such as sputtering, CVD, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com