About: http://webisa.webdatacommons.org/418726662

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart showing an operation of detecting a position and an inclination of ICs of a semiconductor wafer, which can be performed before a bump formation operation of FIGS. 1 and 2;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com