About: http://webisa.webdatacommons.org/418910599

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	With the online monitoring system and using automatic feed-back control of at least one process parameter such as laser power it is possible to establish and maintain optimum process conditions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com