About: http://webisa.webdatacommons.org/418934364

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view showing an embodiment of a bay area 200 of a semiconductor manufacturing line made up of a plurality of processing apparatuses 100 in accordance with the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com