| http://www.w3.org/ns/prov#value | - It is to be noted that the conductive films are laminated layers of the tantalum nitride (TaN) film and the tungsten (W) film here, but not particularly limited, and may be formed by laminating layers each comprising at least one of Ta, W, Ti, Mo, Al, and Cu, or an alloy material or compound material including the element as its main component.
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