PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • A typical example of a prior art micromachined two-sensor/single proof mass accelerometer, commonly referred to as a Rectangle design, is illustrated in FIGS. 1A and 1B. The accelerometer 10 illustrated in FIGS. 1A and 1B is a miniature structure fabricated from a substrate 12 of semiconductor material by conventional micromachining techniques.
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