About: http://webisa.webdatacommons.org/419363049

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, the ratio of Ta to N is about 1:1. [0042] Another example of a layer that is formed according to the present invention is a tantalum nitride (TaN) layer formed on a copper layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es