| http://www.w3.org/ns/prov#value | - Substrate 2 may be formed from a semiconductor material, such as single crystal silicon, single crystal gallium arsenide, polysilicon, indium phosphide, a layered bulk semiconductor substrate(such as a silicon on insulator (SOI) substrate as exemplified by a silicon on glass (SOG) orsilicon on sapphire (SOS) substrate), or any other suitable material.
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