About: http://webisa.webdatacommons.org/419472131

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate 20 includes a structural or base substrate formed of silicon, for example, and a layer of dielectric or other insulator supported by or in contact with the structural substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com