About: http://webisa.webdatacommons.org/419491043

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 e displays the structure after damascene planarization of the overgrown material 56, as shown in FIG. 5 d, using a technique such as chemical-mechanical polishing (CMP).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com