About: http://webisa.webdatacommons.org/41955470

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As indicated above, the present invention is a system for improving the accuracy of estimated electrical properties of features to be created in an integrated circuit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com