About: http://webisa.webdatacommons.org/419738257

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ed by in situ sensor 210, may be forwarded before commencement of, during, or after a manufacturing process, such as a polishing process, in real time, to a control system 215.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com