About: http://webisa.webdatacommons.org/419744879

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Between patterning steps, there may be film depositions, planarizations, and other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	spiedigitallibrary.org